| Name of the Equipment | Sputter Orion |
| Category | gold contaminated |
| Operator | Hemant Kshirsagar Minita Surwade (NH) Arpit Mishra |
| System Owner | Hemant Kshirsagar hemant@ee.iitb.ac.in Akanksha Chouhan 174070019@iitb.ac.in |
| Short Name | |
| Make | AJA international, Inc/ Orion Sputter PHASE |
| Model | |
| Serial Number | DIT/11/EQP/012/12/00 |
| FootPrint | (l) 2318 mm x (b) 762 mm x (h) 2160mm |
| InstallationDate | 01/25/2014 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | 19 |
| AMC | Required |
| Local Dealer | Mr. Varadaraj, Service Executive Engineer Anarghya Innovations and Technology Pvt Ltd, Bengaluru. Ph: +91 80 23376488 M : +91-9743446512 www.anarghyainnotech.com |
| Actual Dealer | AJA Mr. Joe Cronin, Customer Service Engineer AJA International, INC 809 Country Way Scituate, MA 02066 781-545-7365 E-mail: topgun@ajaint.com Web: www.ajaint.com |
| SOP | SOP/197_SOP.pdf |
| Training & other policy documents | POLICY/197_POLICY.pdf |
| Recipies | RECEPIES/197_RECEPIES.pdf |
| Glimpse | GLIMPSE/197_GLIMPSE.pdf |
| Tool Facilities Requirements | chiller, process gases |
| Access | Restricted |
| Lab Phone No | 4411 |
| Substrate allowed | Si, Ge, GaN,GaAs,LSMO,PCMO,YIG,SRO, (No Glass),Lithium Niobate |
| Substrate Dimension | Sample height not more than 3 mm |
| Material allowed | Photoresist, ebeam resist, Nb, NbN, Yb, Sn, Ge, Pt, Au, Gd, IrMn, Cr, YIG, Fe, Ni, Ta, Cu, Ru, Cr, MgO, Al2O3, SnGe alloy, Ti, CoFeB, SiO2, Al, Co, W, Ag, NiFe |
| Chemical allowed | IPA |
| Elements allowed | |
| Target allowed | Yb, Sn, Ge, Pt, Gd, IrMn, Cr,Fe, Ni, Ta, Cu, Ru, Cr, MgO, Al2O3, SnGe alloy, Ti, CoFeB, SiO2, Al, Co, W, Ag, NiFe |
| Target dimension | 2 inch diameter, 0.250 inch thickness |
| Gases allowed | Ar, N2, CDA |
| Contamination remarks | If someone wants to introduce new material/target, he/she needs to get permission for that.Na+ and K+ are not allowed. For outside/ NCPRE/ Org electronics lab samples, contact SO/ Process engineer. |
Equipment Details |
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