Name of the Equipment | DektakXT Profilometer |
Category | litho/analytical |
Operator | Arpit Mishra Manisha Bansode Shahiroze Khetani |
System Owner | Arpit Mishra 30005198@iitb.ac.in Shilpa Kharat 30003402@iitb.ac.in |
Short Name | |
Make | Bruker/ Dektak XT |
Model | Yes |
Serial Number | |
FootPrint | 455 mm W x 550 mm D x 370 mm H (17.9 inch W x 22.6 |
InstallationDate | 08/12/2013 |
Equipment Type | Material and structural characterization |
Location | 18 |
AMC | Required |
Local Dealer | Icon Analytical Equipment Pvt. Ltd Tushar Ph No.9320329883 |
Actual Dealer | Bruker |
SOP | SOP/188_SOP.pdf |
Training & other policy documents | POLICY/188_POLICY.pdf |
Recipies | |
Glimpse | GLIMPSE/188_GLIMPSE.pdf |
Tool Facilities Requirements | Vacuum pump, clean air |
Access | Open |
Lab Phone No | 4464 |
Substrate allowed | Si, Ge, Glass, Sapphire |
Substrate Dimension | Min - 1cmx1cm, Max- 8 inch wafer |
Material allowed | No sticky and soft sample allowed. Density should be greater than 1.001g/cm3 |
Chemical allowed | NA |
Elements allowed | |
Target allowed | NA |
Target dimension | NA |
Gases allowed | NA |
Contamination remarks | Litho/ Analytical |