Name of the Equipment | Dielectric - sputter System |
Category | gold contaminated |
Operator | Minita Surwade (NH) Shilpa Kharat Shahiroze Khetani |
System Owner | Minita Surwade (NH) minita@iitb.ac.in Arpit Mishra 30005198@iitb.ac.in |
Short Name | |
Make | Advanced Process Techonology/ |
Model | Yes |
Serial Number | |
FootPrint | 120 |
InstallationDate | 08/04/2005 |
Equipment Type | Deposition, Growth and Annealing systems |
Location | 16 |
AMC | Available |
Local Dealer | NA NA |
Actual Dealer | NA NA |
SOP | SOP/84_SOP.pdf |
Training & other policy documents | |
Recipies | RECEPIES/84_RECEPIES.pdf |
Glimpse | GLIMPSE/84_Glimpse.pdf |
Tool Facilities Requirements | Chiller |
Access | Open |
Lab Phone No | 4405 |
Substrate allowed | Glass, Si, Ge, Sapphire, Quartz, GaN |
Substrate Dimension | maximun size 2 inch |
Material allowed | ppr, su8, PMMA, gold, Cu & other metals |
Chemical allowed | NA |
Elements allowed | |
Target allowed | SiO2, HfO2, ZnO, ZnMgO |
Target dimension | SiO2, HfO2, ZnO, ZnMgO |
Gases allowed | oxygen & Argon And Nitrogen |
Contamination remarks | Mg exception |