| Name of the Equipment | UV exposure system |
| Category | litho/analytical |
| Operator | Robin Singla Guru Burkul Kalaivani Srinivasan |
| System Owner | |
| Short Name | |
| Make | Kemi Moosa/ KUVC-2 |
| Model | No |
| Serial Number | NA |
| FootPrint | 50 cm X 30 cm |
| InstallationDate | 01/07/2014 |
| Equipment Type | Miscellaneous |
| Location | 22 |
| AMC | Not Required |
| Local Dealer | NA NA |
| Actual Dealer | Kemi Moosa moideenkemi@gmail.com |
| SOP | SOP/201_SOP.pdf |
| Training & other policy documents | POLICY/201_POLICY.pdf |
| Recipies | |
| Glimpse | GLIMPSE/201_GLIMPSE.pdf |
| Tool Facilities Requirements | NA |
| Access | Open |
| Lab Phone No | 4489 Ext Flash 113 |
| Substrate allowed | Any |
| Substrate Dimension | small pieces to 6 inch wafer |
| Material allowed | Any |
| Chemical allowed | NA |
| Elements allowed | NA |
| Target allowed | NA |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks | NA |
Equipment Details |
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