Name of the Equipment | HRXRD |
Category | in line ac |
Operator | Gopika Suresh manshi chaturvedi Anjum Khan |
System Owner | Pankajkumar Gound p15129@iitb.ac.in Swagata Bhunia 154120016@iitb.ac.in |
Short Name | |
Make | Rigaku/ Smartlab 3KW |
Model | No |
Serial Number | ID3822N |
FootPrint | Width =~1200 mm Depth =~900 mm Height =~1820 |
InstallationDate | 10/08/2013 |
Equipment Type | Material and structural characterization |
Location | 16 |
AMC | Required |
Local Dealer | I R Technology Services Pvt Ltd M/s. I.R. Technology Services Pvt. Ltd. EL-91, TTC Industrial Area, MIDC, Mahape, Navi Mumbai - 400 710 Tel: 022-6789 6600/18/06 Fax:022-2768 1253 Email: sales_newbom@irtech.in |
Actual Dealer | Rigaku M/s. Rigaku Corporation, International Marketing Division, 3-9-12 Matsubara-Cho, Akishima-Shi, Tokyo - 196-8666 Japan |
SOP | SOP/198_SOP.pdf |
Training & other policy documents | POLICY/198_POLICY.pdf |
Recipies | |
Glimpse | GLIMPSE/198_GLIMPSE.pdf |
Tool Facilities Requirements | Chiller |
Access | Restricted |
Lab Phone No | 4405 |
Substrate allowed | Si, Ge, Glass, Sapphire, GaAs, GaN, STO |
Substrate Dimension | Min - 1cmx1cm, Max- 4 inch wafer |
Material allowed | Only thin films |
Chemical allowed | IPA To clean chuck |
Elements allowed | |
Target allowed | N.A |
Target dimension | N.A |
Gases allowed | N.A |
Contamination remarks | SUBSTRATE SHOULD NOT BE REACTING WITH AL CHUCK |