CEN - Centre of Excellence in Nanoelectronics

Equipment Details



Name of the EquipmentKarl Suss MJB4 Mask Aligner
Categorylitho/analytical
OperatorHemant Kshirsagar
Pankajkumar Gound
manshi chaturvedi
System Owner manshi chaturvedi
30005017@iitb.ac.in

Hemant Kshirsagar
hemant@ee.iitb.ac.in

Short NameNA
MakeSuss Microtec/ MJB4
ModelYes
Serial Number06130848
FootPrint603mm*769mm*658mm
InstallationDate10/15/2013
Equipment TypeLithography
Location17
AMC Required
Local DealerOM Scientific

M/s Om Scientific,Pune Contact person :-Anand Vairagar/Shaliesh Latey(shaileshlatey@gmail.com) 917563100/9867770801
Actual DealerSuss Microtec

Suss Microtec M/s Suss MicroTec , Germany http://www.suss.com/en.html
SOP SOP/190_SOP.pdf
Training & other policy documentsPOLICY/190_POLICY.pdf
Recipies
Glimpse GLIMPSE/190_GLIMPSE.pdf
Tool Facilities RequirementsNItrogen gas and CDA
AccessOpen
Lab Phone No4405
Substrate allowedSi,GaN, GaAs, Ge
Substrate Dimensionupto 4 inch
Material allowedsio2,si
Chemical allowedonly photo resist
Elements allowed
Target allowedN/A
Target dimensionN/A
Gases allowedNitrogen
Contamination remarksSamples must be free of backside contamination. Mask should be checked after each working session. Clean with acetone / IPA or with soft tissue to remove any solid or liquid residues.
Released on 02-02-2022 Version 5.0

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