CEN - Centre of Excellence in Nanoelectronics

Equipment Details



Name of the EquipmentFilmetrics Reflectometer
Categorylitho/analytical
OperatorArpit Mishra
Manisha Bansode
Shahiroze Khetani
System Owner Manisha Bansode
manishak@ee.iitb.ac.in

Shilpa Kharat
30003402@iitb.ac.in

Short Name
MakeJapan/ F40 UV-VIS
Model
Serial Number12L306
FootPrint3ft by 3ft
InstallationDate02/09/2013
Equipment TypeMaterial and structural characterization
Location18
AMC Required
Local DealerNo local agent

No Local Egent
Actual DealerFilmetrics, Inc.

Filmetrics, Inc. 3560 Dunhill Street, Stc.100 San Diego, CA 92121, USA Tel No. (858)573-9300 EMail: chen@filmetrics.com
SOP SOP/161_SOP.pdf
Training & other policy documents
Recipies
Glimpse GLIMPSE/161_GLIMPSE.pdf
Tool Facilities RequirementsNA
AccessOpen
Lab Phone No4464
Substrate allowedAny
Substrate DimensionBigger than 5mm x 5mm
Material allowedAll
Chemical allowedAll
Elements allowed
Target allowedNA
Target dimensionNA
Gases allowedNA
Contamination remarksNA
Released on 02-02-2022 Version 5.0

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