Name of the Equipment | Spinner 2 inch (General Purpose) |
Category | litho/analytical |
Operator | Hemant Kshirsagar Pankajkumar Gound manshi chaturvedi |
System Owner | manshi chaturvedi 30005017@iitb.ac.in Hemant Kshirsagar hemant@ee.iitb.ac.in |
Short Name | |
Make | NA/ WS-4008-6NPP/ LIT |
Model | |
Serial Number | 07104 |
FootPrint | 11 |
InstallationDate | |
Equipment Type | Lithography |
Location | 17 |
AMC | Not Required |
Local Dealer | M/s Simco Global Technology & Systems Ltd M/s Simco Global Technology & Systems Ltd. 304, Thacker Tower, Sector-17, Vashi, Navi Mumbai 400 705 |
Actual Dealer | M/s Laurell Techonologies Corporation, 441, Indust sales@laurel.com |
SOP | SOP/138_SOP.pdf |
Training & other policy documents | |
Recipies | |
Glimpse | |
Tool Facilities Requirements | N2 gas |
Access | Open |
Lab Phone No | 4493 |
Substrate allowed | Glass, Si, Quartz, GaN, G aAs |
Substrate Dimension | minimum quarter of a 2 inch wafer; maximum a 2 inch wafer |
Material allowed | PPR, SU8, CBlack, SO D(B and P), HMDS, P3HT, PVD F, PDMS |
Chemical allowed | Acetone for cleaning |
Elements allowed | |
Target allowed | NA |
Target dimension | NA |
Gases allowed | NA |
Contamination remarks | clean wafers |