| Name of the Equipment | Spinner 2 inch (PPR -AZ) |
| Category | litho/analytical |
| Operator | Hemant Kshirsagar Pankajkumar Gound manshi chaturvedi |
| System Owner | Pankajkumar Gound p15129@iitb.ac.in Hemant Kshirsagar hemant@ee.iitb.ac.in |
| Short Name | |
| Make | / WS-4008-6NPP/ LIT |
| Model | |
| Serial Number | 05626 |
| FootPrint | 11 |
| InstallationDate | |
| Equipment Type | Lithography |
| Location | 17 |
| AMC | Not Required |
| Local Dealer | M/s Simco |
| Actual Dealer | M/s Laurell Techonologies Corporation,441,Industri E-mail:sales@laurell.com |
| SOP | SOP/137_SOP.pdf |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | N2 gas |
| Access | Open |
| Lab Phone No | 4493 |
| Substrate allowed | 2 |
| Substrate Dimension | 1/4 of 2 |
| Material allowed | PPR,AZ |
| Chemical allowed | Acetone for cleaning |
| Elements allowed | |
| Target allowed | NA |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks | wafers to be clean |
Equipment Details |
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