Name of the Equipment | 2 inch RCA Clean Station |
Category | clean (for si) |
Operator | Shilpa Kharat Shahiroze Khetani Arpit Mishra |
System Owner | Minita Surwade (NH) minita@iitb.ac.in Shahiroze Khetani 30005034@iitb.ac.in |
Short Name | |
Make | M/S Laxmi Instruments/ NA |
Model | |
Serial Number | 200801132 (P O numbe |
FootPrint | 465cm X 287cm |
InstallationDate | 03/25/2009 |
Equipment Type | Bonding tools |
Location | 6 |
AMC | Not Required |
Local Dealer | Rupesh Khule 07208246450(for DI water system) |
Actual Dealer | NA NA |
SOP | SOP/132_SOP.pdf |
Training & other policy documents | POLICY/132_Policy.pdf |
Recipies | RECEPIES/132_RECEPIES.pdf |
Glimpse | GLIMPSE/132_Glimpse.pdf |
Tool Facilities Requirements | DI Water, Chemicals, Heater |
Access | Open |
Lab Phone No | 4464 |
Substrate allowed | Silicon wafers only |
Substrate Dimension | 1/4 of 2 inch minimum. 2 inch maximum |
Material allowed | Only Si wafers, and Quartz glass |
Chemical allowed | Ammonium Hydroxide, H2O2, HCl, HF, DI water |
Elements allowed | |
Target allowed | NA |
Target dimension | NA |
Gases allowed | NA |
Contamination remarks | No other chemicals allowed. No glasswares allowed. Only teflon and quartz is allowed. Sodium and potassium contamination strictly prohibited. |